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CMPxML
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CMPMode
Title Group
Cell Array Periodic Number
Material Sets
Layer Sets
Zoom In Ref. Pln. File
CMP Slurry Sets
CMP Pad Sets
CMP Preston Sets
CMP Step Sets
Wafer Property
CMP Units
Output Unit
Convergence Limit
Nanotopography
LMatrix
Boundary Element Division Size
Time Counter
Selected Points Output Sets
CMP Solver Set
Calculation Results Output Options
Retainer
Wax Mount Prss.

CMPxML Version 0.0

CMPxML is based on the well-known open standard XML.

The best way to learn CMPxML quickly is to run some Samples, read their CMPxML and rewrite them. When you want to learn more, please come back to this page.

CMPxML will start like this with <CMPxML> tag.

<?xml version="1.0" encoding="UTF-8" ?>
<!-- CMP Scenario Script ver.0.0 by XML-->
<CMPxML version="0.0">

    ...
    ... Write script between CMPxML tag
    ...

</CMPxML>

Note) Prohibited character literals ~ <, >, &, ', "
They can not be used as element content or attribute values. Instead,
a character entity must be used as &lt; for < , &amp; for &, &gt; for >, &apos; for ' and &quot; for ".

About XML specifications, please access http://www.w3.org/XML/.

Reference

"A Universal CMP Process Description Language for Standardization", Proc. MRS, W2.9, (2005)

CMPxML Elements Index (Alphabetical Order)

AreaRatio
AreaRatioMatrixFileName
AreaRatioMatrixFileRead

BackSideCMPStep
BackSideCMPStepSets
BacksideLayer
BackSideLayerMatCompositeFilmInformation
BackSideLayerSets
BackSideLayerZ-Index
BackSideNanotopographyMatrixFile
BackSideNanotopographyMatrixFileName
BackSideReferencePlaneLayer
BackSideReferencePlaneLayerSets
BackSideRefLayerMatCompositeFilmInformation
BCCLLimit
BCMatrixOutput
BoundaryElementDivisionSize
BoundaryElementDivisionSizeX
BoundaryElementDivisionSizeY

CalculationResultsOutputOptions
CarriageReturnLineFeed
CellArrayPeriodicNumber
CMPMode
CMPPad
CMPPad-AsperityE
CMPPad-AsperityN
CMPPad-AsperityT
CMPPadComment
CMPPad-E1
CMPPad-E2
CMPPad-FMatrixName
CMPPad-FMatrixRead
CMPPad-InverseFMatrixName
CMPPad-InverseFMatrixRead
CMPPadMode
CMPPad-n1
CMPPad-n2
CMPPadName
CMPPadNo
CMPPad-Pm
CMPPadSets
CMPPad-t1
CMPPad-t2
CMPPadYoungModulusUnit
CMPPressure
CMPPressureUnit
CMPPreston
CMPPreston-C1
CMPPreston-C1Unit
CMPPreston-C2
CMPPreston-C3
CMPPreston-C4
CMPPreston-C5
CMPPreston-C6
CMPPreston-C7
CMPPrestonComment
CMPPrestonMatNo
CMPPrestonPadNo
CMPPreston-Pth
CMPPrestonSets
CMPPrestonSFlow
CMPPrestonSlyNo
CMPRalativeVelocity
CMPRalativeVelocityUnit
CMPSlurry
CMPSlurryComment
CMPSlurryConcetration
CMPSlurryFlowRate
CMPSlurryFlowRateUnit
CMPSlurryName
CMPSlurryNo
CMPSlurrySets
CMPSolverSet
CMPStep
CMPStepComment
CMPStepSets
CMPTemperaturedT
CMPTemperaturek1
CMPTemperaturek2
CMPTemperatureT0
CMPTime
CMPTimeUnit
CMPUnits
Comment
CompositeFilmMatDensity
CompositeFilmMatDensityMatrixFileName
CompositeFilmMatNo
ConvergenceLimit

DisplacementUnit
dUWaferCfMax
dUWaferDelay
dUWaferGPSkp
dUWaferLimit

FBDOutput
FEMInfomationOutput
FMatrixOutput

GAPDLimit
GetCMPPressureMode

ILMatrixOutput
InitialShapeOutput
InverseFMatrixOutput
InverseLMatrixName
InverseLMatrixRead

KMatrixOutput

Layer
LayerMatCompositeFilm
LayerMatCompositeFilmInformation
LayerMatCompositeFilmName
LayerMatNo
LayerMatrixFile
LayerSetParameter
LayerSets
LayerZ-Index
LayerZ-IndexCoodinates
LMatrixName
LMatrixOutput
LMatrixRead
LMatrixSet

Material
MaterialName
MaterialSets

NanotopographyMatrixFile
NanotopographyMatrixFileName

OutputCycleTime
OutputUnit

PressureUnit

ReferencePlaneLayer
ReferencePlaneLayerSets
RefLayerAreaRatio
RefLayerComment
RefLayerMatCompositeFilm
RefLayerMatCompositeFilmInformation
RefLayerMatCompositeFilmName
RefLayerMatNo
RefLayerZ-Index
Retainer
RetainerMatrixFile
RetainerPressure
RFMatrixOutput

SelectedPointsOutput
SelectedPointsOutputSets
SelectedPointsOutputX
SelectedPointsOutputY

TimeCounter
TimerCounterComment
TimerCounterEnd
TimerCounterInterval
TimerCounterStart
Title
TitleGroup

UWaferOutput

WaferProperty
WaferProperty-E
WaferProperty-n
WaferProperty-Tw
WaxMountPressure
WMatrixOutput

ZoomInReferencePlaneFile
ZoomInReferencePlaneFileName
ZoomInReferencePlaneFilePointer
ZoomInReferencePlaneFileRead

 

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Last modified: 12/01/05