|
CMP Mode
<!--CMPMode-->
<CMPMode>CMPSingleSidePolishingWaferRigidWithRefPln</CMPMode>
Available CMP Modes for Evaluation Version
CMPSingleSidePolishingWaferRigidPeriodic
CMPSingleSidePolishingWaferRigidPeriodicR
CMPSingleSidePolishingWaferRigidWithoutRefPln.xsd
CMPSingleSidePolishingWaferRigidWithRefPln
CMPSingleSidePolishingWaferElastic
CMPSingleSidePolishingWaferElasticPeriodic
CMPSingleSidePolishingWaferElasticWaxElasticStamp
CMPSingleSidePolishingWaferElasticWaxElasticStampPeriodic
CMPSingleSidePolishingWaferElasticWaxlessElasticChuck
CMPSingleSidePolishingWaferElasticWaxlessElasticChuckPeriodic
CMPSingleSidePolishingWaferElasticWaxlessPneumaticChuck
CMPSingleSidePolishingWaferElasticWaxlessPneumaticChuckPeriodic
CMPSingleSidePolishingWaferElasticWaxPneumaticStamp
CMPSingleSidePolishingWaferElasticWaxPneumaticStampPeriodic
CMPSingleSidePolishingWaferRigidAxiSymmetricWithoutRefPln
CMPSingleSidePolishingWaferRigidAxiSymmetricWithoutRefPlnWithRetainer
CMPSingleSidePolishingWaferRigidAxiSymmetricWithoutRefPlnWithRetainerWAveHeight
CMPSingleSidePolishingWaferRigidAxiSymmetricWithoutRefPlnWithRetainerWideSpace
CMPSingleSidePolishingWaferRigidAxiSymmetricWithRefPln
CMPSingleSidePolishingWaferRigidAxiSymmetricWithRefPlnWaferEdge
CMPDoubleSidePolishingWaferElastic
CMPDoubleSidePolishingWaferElasticPeriodic
Available CMP Modes for Subscription Version
CMPPadAsperitySimulation
CMPPadAsperitySimulationYield
CMPSingleSidePolishingWaferRigidPeriodicHeat
CMPSingleSidePolishingWaferRigidWithRefPlnHeat
CMPSingleSidePolishingWaferRigidPeriodicSymmetry
CMPSingleSidePolishingWaferRigidWithRefPlnSymmetry
CMPSingleSidePolishingWaferRigidPeriodicHeatSymmetry
| 
