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CMP Pad Sets
<!--Pad Sets-->
<CMPPadSets>
<CMPPad No="1">
<CMPPadName>Pad1</CMPPadName>
<CMPPadMode>2</CMPPadMode>
CMPPadMode
~ Upper
Layer Pad
<CMPPad-E1>15000</CMPPad-E1>
~ Young's Modulus (gf/mm2)
<CMPPad-n1>0.25</CMPPad-n1>
~ Poisson's Ratio (no unit)
<CMPPad-t1>1.00</CMPPad-t1>
~ Pad Thickness (mm)
~ lower
Layer Pad
<CMPPad-E2>500</CMPPad-E2>
~ Young's Modulus (gf/mm2)
<CMPPad-n2>0.25</CMPPad-n2>
~ Poisson's Ratio (no unit)
<CMPPad-t2>2.00</CMPPad-t2>
~ Pad Thickness (mm)
~ Pad Asperity Parameters - this will be explained at MRS
2004.
<CMPPad-AsperityT>0.010</CMPPad-AsperityT>
<CMPPad-AsperityE>0.01</CMPPad-AsperityE>
<CMPPad-AsperityN>1.0</CMPPad-AsperityN>
~
External FMatrix Read Function
See FMatrix Data Service
<CMPPad-FMatrixRead>off</CMPPad-FMatrixRead>
~ "on" or "off"
<CMPPad-FMatrixName>\FMatrixFS.txt</CMPPad-FMatrixName>
<CMPPad-InverseFMatrixRead>off</CMPPad-InverseFMatrixRead>
~ "on" or "off"
<CMPPad-InverseFMatrixName>\IFMatrixFS.txt</CMPPad-InverseFMatrixName>
<CMPPad-Pm>0</CMPPad-Pm>
~ Set "0" Not used by this application, yet.
<CMPPadComment>StackedPad</CMPPadComment>
</CMPPad>
<CMPPad No="2">
<CMPPadName>Pad2</CMPPadName>
<CMPPadMode>1</CMPPadMode>
<CMPPad-E1>60</CMPPad-E1>
<CMPPad-n1>0.25</CMPPad-n1>
<CMPPad-t1>2.00</CMPPad-t1>
<CMPPad-E2>500</CMPPad-E2>
<CMPPad-n2>0.00</CMPPad-n2>
<CMPPad-t2>0.00</CMPPad-t2>
<CMPPad-AsperityT>0.0</CMPPad-AsperityT>
<CMPPad-AsperityE>1.0</CMPPad-AsperityE>
<CMPPad-AsperityN>1.0</CMPPad-AsperityN>
<CMPPad-FMatrixRead>off</CMPPad-FMatrixRead>
<CMPPad-FMatrixName>\FMatrix.txt</CMPPad-FMatrixName>
<CMPPad-InverseFMatrixRead>off</CMPPad-InverseFMatrixRead>
<CMPPad-InverseFMatrixName>\IFMatrix.txt</CMPPad-InverseFMatrixName>
<CMPPad-Pm>0</CMPPad-Pm>
<CMPPadComment>PolyUrithan</CMPPadComment>
</CMPPad>
</CMPPadSets>
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