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CMP Preston Sets
<!--CMP Preston Sets-->
<CMPPrestonSets>
<CMPPreston No="1">
~
"Default" or "Custom"
How to use customized MRR Equation
<CMPMRREquation>Default</CMPMRREquation>
<CMPPrestonMatNo>1</CMPPrestonMatNo>
<CMPPrestonSlyNo>1</CMPPrestonSlyNo>
<CMPPrestonPadNo>1</CMPPrestonPadNo>
~
Preston Coefficients
Generalized Preston Equation
<CMPPrestonSFlow>250</CMPPrestonSFlow>
~ (cc/min)
<CMPPreston-C1>1.29E-09</CMPPreston-C1>
~ (1/[gf/mm2])
<CMPPreston-C2>1</CMPPreston-C2>
<CMPPreston-C3>0</CMPPreston-C3>
<CMPPreston-C4>0</CMPPreston-C4>
<CMPPreston-C5>1</CMPPreston-C5>
<CMPPreston-C6>0</CMPPreston-C6>
<CMPPreston-C7>0</CMPPreston-C7>
<CMPPreston-C8>0</CMPPreston-C8>
~ (kJ/mol)
<CMPPreston-Pth>0</CMPPreston-Pth>
<CMPPrestonComment>CVDSiO2/Slurry1/Pad1</CMPPrestonComment>
</CMPPreston>
<CMPPreston No="2">
<CMPMRREquation>Default</CMPMRREquation>
<CMPPrestonMatNo>1</CMPPrestonMatNo>
<CMPPrestonSlyNo>1</CMPPrestonSlyNo>
<CMPPrestonPadNo>2</CMPPrestonPadNo>
<CMPPrestonSFlow>250</CMPPrestonSFlow>
<CMPPreston-C1>0</CMPPreston-C1>
<CMPPreston-C2>0</CMPPreston-C2>
<CMPPreston-C3>0</CMPPreston-C3>
<CMPPreston-C4>0</CMPPreston-C4>
<CMPPreston-C5>0</CMPPreston-C5>
<CMPPreston-C6>0</CMPPreston-C6>
<CMPPreston-C7>0</CMPPreston-C7>
<CMPPreston-Pth>0</CMPPreston-Pth>
<CMPPrestonComment>CVDSiO2/DIW/Pad2</CMPPrestonComment>
</CMPPreston>
<CMPPreston No="3">
<CMPPrestonMatNo>2</CMPPrestonMatNo>
<CMPMRREquation>Default</CMPMRREquation>
<CMPPrestonSlyNo>1</CMPPrestonSlyNo>
<CMPPrestonPadNo>1</CMPPrestonPadNo>
<CMPPrestonSFlow>250</CMPPrestonSFlow>
<CMPPreston-C1>0</CMPPreston-C1>
<CMPPreston-C2>0</CMPPreston-C2>
<CMPPreston-C3>0</CMPPreston-C3>
<CMPPreston-C4>0</CMPPreston-C4>
<CMPPreston-C5>0</CMPPreston-C5>
<CMPPreston-C6>0</CMPPreston-C6>
<CMPPreston-C7>0</CMPPreston-C7>
<CMPPreston-Pth>0</CMPPreston-Pth>
<CMPPrestonComment>Al/Slurry1/Pad1</CMPPrestonComment>
</CMPPreston>
<CMPPreston No="4">
<CMPMRREquation>Default</CMPMRREquation>
<CMPPrestonMatNo>2</CMPPrestonMatNo>
<CMPPrestonSlyNo>1</CMPPrestonSlyNo>
<CMPPrestonPadNo>2</CMPPrestonPadNo>
<CMPPrestonSFlow>250</CMPPrestonSFlow>
<CMPPreston-C1>0</CMPPreston-C1>
<CMPPreston-C2>0</CMPPreston-C2>
<CMPPreston-C3>0</CMPPreston-C3>
<CMPPreston-C4>0</CMPPreston-C4>
<CMPPreston-C5>0</CMPPreston-C5>
<CMPPreston-C6>0</CMPPreston-C6>
<CMPPreston-C7>0</CMPPreston-C7>
<CMPPreston-Pth>0</CMPPreston-Pth>
<CMPPrestonComment>Al/DIW/Pad2</CMPPrestonComment>
</CMPPreston>
</CMPPrestonSets>
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