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CMP Slurry Sets
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CMP Slurry Sets

<!--Slurry Sets-->
<CMPSlurrySets>

    <CMPSlurry No="1">
        <CMPSlurryName>Slurry1</CMPSlurryName>
        <CMPSlurryConcetration>1.0</CMPSlurryConcetration> ~ (Ratio)
        <CMPSlurryComment>Silica/KOH</CMPSlurryComment>
    </CMPSlurry>

    <CMPSlurry No="2">
        <CMPSlurryName>DIW</CMPSlurryName>
        <CMPSlurryConcetration>1.0</CMPSlurryConcetration>
        <CMPSlurryComment>DIW</CMPSlurryComment>
    </CMPSlurry>

</CMPSlurrySets>

 

 

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Last modified: 04/30/05