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CMP Step Sets
<!--CMP Step Setting-->
<CMPStepSets>
<CMPStep No="1">
<CMPTime>180</CMPTime>
~ (sec)
<CMPPressure>350</CMPPressure>
~ (gf/cm2)
<CMPRalativeVelocity>700</CMPRalativeVelocity>
~ (mm/sec)
<CMPSlurryNo>1</CMPSlurryNo>
<CMPPadNo>1</CMPPadNo>
<CMPSlurryFlowRate>250</CMPSlurryFlowRate>
~ (cc/min)
~
Temperature Trend Setting
This temperature is used in Rate
equation
<CMPTemperatureT0>20</CMPTemperatureT0>
~ (Celsius Degree)
<CMPTemperaturek1>0</CMPTemperaturek1>
<CMPTemperaturedT>0</CMPTemperaturedT>
<CMPTemperaturek2>0</CMPTemperaturek2>
<CMPStepComment>Platen1</CMPStepComment>
</CMPStep>
<CMPStep No="2">
<CMPTime>10</CMPTime>
<CMPPressure>70</CMPPressure>
<CMPRalativeVelocity>100</CMPRalativeVelocity>
<CMPSlurryNo>1</CMPSlurryNo>
<CMPPadNo>1</CMPPadNo>
<CMPSlurryFlowRate>250</CMPSlurryFlowRate>
<CMPTemperatureT0>0</CMPTemperatureT0>
<CMPTemperaturek1>0.05</CMPTemperaturek1>
<CMPTemperaturedT>0</CMPTemperaturedT>
<CMPTemperaturek2>0</CMPTemperaturek2>
<CMPStepComment>Platen1</CMPStepComment>
</CMPStep>
</CMPStepSets>
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