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CMP Units
Home Up CMPMode Title Group Cell Array Periodic Number Material Sets Layer Sets Zoom In Ref. Pln. File CMP Slurry Sets CMP Pad Sets CMP Preston Sets CMP Step Sets Wafer Property CMP Units Output Unit Convergence Limit Nanotopography LMatrix Boundary Element Division Size Time Counter Selected Points Output Sets CMP Solver Set Calculation Results Output Options Retainer Wax Mount Prss.

 


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CMP Units

<!--CMP Units-->
<CMPUnits>
    <CMPTimeUnit>sec</CMPTimeUnit>
    <CMPPressureUnit>gf/cm2</CMPPressureUnit>
    <CMPRalativeVelocityUnit>mm/sec</CMPRalativeVelocityUnit>
    <CMPSlurryFlowRateUnit>cc/min</CMPSlurryFlowRateUnit>
    <CMPPadYoungModulusUnit>gf/mm2</CMPPadYoungModulusUnit>
    <CMPPreston-C1Unit>mm2/gf</CMPPreston-C1Unit>
</CMPUnits>

 

 

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Last modified: 04/30/05