Home Up Feedback Contents Download Search Search Results

Layer Sets
Home Up CMPMode Title Group Cell Array Periodic Number Material Sets Layer Sets Zoom In Ref. Pln. File CMP Slurry Sets CMP Pad Sets CMP Preston Sets CMP Step Sets Wafer Property CMP Units Output Unit Convergence Limit Nanotopography LMatrix Boundary Element Division Size Time Counter Selected Points Output Sets CMP Solver Set Calculation Results Output Options Retainer Wax Mount Prss.

 


Up

Layer Sets

<!--LayerSet-->
<LayerSets>
    <Layer No="1">
        <LayerSetParameter>1</LayerSetParameter> ~ 1: LayerZ-Index, 2: Absolute Value (A)
        <LayerMatNo>1</LayerMatNo>
        <AreaRatio>1</AreaRatio>
        <AreaRatioMatrixFileRead>off</AreaRatioMatrixFileRead>
        <AreaRatioMatrixFileName></AreaRatioMatrixFileName>
        <Comment>Layer1</Comment>

        <LayerMatrixFile>MatrixLayer01.txt</LayerMatrixFile>
        <LayerZ-Index No="1">
            <LayerZ-IndexCoodinates>15000</LayerZ-IndexCoodinates>
        </LayerZ-Index>
        <LayerZ-Index No="2">
            <LayerZ-IndexCoodinates>10000</LayerZ-IndexCoodinates>
        </LayerZ-Index>

        <LayerMatCompositeFilm>off</LayerMatCompositeFilm>
        <LayerMatCompositeFilmName></LayerMatCompositeFilmName>
    </Layer>

    <Layer No="2">
        <LayerSetParameter>1</LayerSetParameter>
        <LayerMatNo>2</LayerMatNo>
        <AreaRatio>1</AreaRatio>
        <AreaRatioMatrixFileRead>off</AreaRatioMatrixFileRead>
        <AreaRatioMatrixFileName></AreaRatioMatrixFileName>
        <Comment>Layer2</Comment>

        <LayerMatrixFile>MatrixLayer02.txt</LayerMatrixFile>
        <LayerZ-Index No="1">
            <LayerZ-IndexCoodinates>5000</LayerZ-IndexCoodinates>
        </LayerZ-Index>

        <LayerMatCompositeFilm>off</LayerMatCompositeFilm>
        <LayerMatCompositeFilmName></LayerMatCompositeFilmName>
    </Layer>

    <Layer No="3">
        <LayerSetParameter>1</LayerSetParameter>
        <LayerMatNo>1</LayerMatNo>
        <AreaRatio>1</AreaRatio>
        <AreaRatio>1.0</AreaRatio>
        <AreaRatioMatrixFileRead>off</AreaRatioMatrixFileRead>
        <AreaRatioMatrixFileName></AreaRatioMatrixFileName>
        <Comment>Layer3</Comment>

        <LayerMatrixFile>MatrixLayer03.txt</LayerMatrixFile>
        <LayerZ-Index No="1">
            <LayerZ-IndexCoodinates>0</LayerZ-IndexCoodinates>
        </LayerZ-Index>

        <LayerMatCompositeFilm>off</LayerMatCompositeFilm>
        <LayerMatCompositeFilmName></LayerMatCompositeFilmName>
      </Layer>

    <!--Reference Plane Layer Sets-->
    <ReferencePlaneLayerSets>
        <ReferencePlaneLayer No="1">
            <RefLayerZ-Index>12500</RefLayerZ-Index>
            <RefLayerMatNo>1</RefLayerMatNo>
            <RefLayerAreaRatio>1</RefLayerAreaRatio>
            <RefLayerComment>Layer1</RefLayerComment>
            <RefLayerMatCompositeFilm>off</RefLayerMatCompositeFilm>
            <RefLayerMatCompositeFilmName></RefLayerMatCompositeFilmName>
        </ReferencePlaneLayer>

        <ReferencePlaneLayer No="2">
            <RefLayerZ-Index>0</RefLayerZ-Index>
            <RefLayerMatNo>1</RefLayerMatNo>
            <RefLayerAreaRatio>1</RefLayerAreaRatio>
            <RefLayerComment>Layer3</RefLayerComment>
            <RefLayerMatCompositeFilm>off</RefLayerMatCompositeFilm>
            <RefLayerMatCompositeFilmName></RefLayerMatCompositeFilmName>
        </ReferencePlaneLayer>
    </ReferencePlaneLayerSets>

</LayerSets>

 

 

Send mail to istation@ynt-jp.com with questions or comments about this web site.
Last modified: 04/30/05