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CMP3DPro ~ CMP Simulator
CMP3DPro is a full
wafer and chip level CMP simulator based on BEM (Boundary Element
Method). It has a wide scalability, zoom-in functions and
multi-step features. Now, it is also optimized for professional purpose,
Very Fast! To save your time, we'll start "Data
Service", too!
Fig 1. Scalability of CMP3DPro
CMP3DPro consists of two
applications, CMP
processor "CMP3DPro Console"
and CMP post-processor "CMP3DProView."
CMP3DPro Console will simulate CMP in accordance with a text base CMP
script, CMPxML, and creates several useful outputs.
CMP3DProView
will post-process the outputs of CMP3DPro Console and creates 3D and 2D chart
view for analysis.
Fig 2. Over View of CMP3DPro Application
System Requirements
OS - Windows98 or later version (Me/2000/XP) with
.NET Framework ver.1.1
CMP3DProView does not support Windows98,
98SE
RAM Memory Size - Depends on Mesh Number and
Editions
Evaluation Edition
Mesh 20 x 20 - more than 128 MBytes recommended
Mesh 40 x 40 - more than 256 MBytes recommended
Mesh 80 x 80 - more than 1 GBytes recommended
Standard and Professional Editions (Memory
Save Mode)
Mesh 20 x 20 - more than 32 MBytes recommended
Mesh 40 x 40 - more than 64 MBytes recommended
Mesh 80 x 80 - more than 128 MBytes recommended
Installation
Please
download the setup file to your local disk and double-click it to start
installation procedure. It will creates icons on your desktop and a program
group named "Virtual Siliconlab" with several icons.
The detail about installation is
here.
Samples
This version contains
20 samples for quick learning.
Quick Start
Let's take a quick start with a
simple sample.
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