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How to run CMP3DPro Console
This is an example of CMP3DPro execution command
for sample01. Please see CMP3DPro
Quick Start for your fast learning.
CMP3DPro /DIR:CMPxML\Sample01 /LDL:0
Command Line Help
CMP3DPro Console is an
application which is able to run on command line. This is suitable for batch
file processing.
You can see the explanation of its options by entering CMP3DPro /? on
command line like this below.
Explanation shown by Command line Help (CMP3DPro
/?)
CMP Process Simulation Software CMP3DPro Evaluation
Version Ver.1.1.2.8
<Product No:123-1234-1234, Company:user, User:user>
CMP3DPRO [/DIR:XMLDirectory][/XML:XMLFile][/LDL:DisplayLevel]
/DIR:XMLDirectory <- Specify
Directory Name ex. CMPxML
/XML:XMLFile
<- Specify XML File Name ex. CMPxML.xml
/LDL:DisplayLevel <- Specify
Log Display Level (0-5)
For Example. CMP3DPro /DIR:SomeDir\SomeCMPxML /XML:SomeCMPxML.xml
Default Setting. /DIR:CMPxML, /XML:CMPxML.xml, /LDL:0
CMP3DPRO /? for Command line Help
CMP3DPRO /?? for Online Help
CMP3DPRO /??? for E-mail Help
CMP3DPRO /! for User's FeedBack
(Note) This console version is very useful for a batch file.
Result Files
File 17~29 are Optional. Please see
"CalculationResultsOutputOptions."
FS = Front Side, BS = Back Side, ### = Serial No.
| No. |
File Name |
Comment |
| 1. |
CalTime.txt |
Calculation Time Detail |
| 2. |
CMPStepInformationFS[BS].txt |
CMP Step Condition |
| 3. |
CMPTemperatureFS[BS].txt |
CMP Average Temperature |
| 4. |
DomainFlagFS[BS].txt |
Field Domain Flag |
| 5. |
CMPPreston.txt |
CMP Preston Set Detail |
| 6. |
CMPSLayerNoFS[BS].txt |
Layer No. Detail |
| 7. |
CMPSMaterialFS[BS].txt |
Surface Material |
| 8. |
CMPSMaterialNoFS[BS].txt |
Surface Material No. |
| 9. |
CMPFilmFS[BS].txt |
Surface Film Thickness Height Result |
| 10. |
CMPFilmSurfaceFS[BS].txt |
Surface Film Thickness Variation Result |
| 11. |
CMPFilmSurfaceTopographyFS[BS].txt |
Surface Topography (Non-Chucked Shape) |
| 12. |
CMPFilmSurfaceTopographyWaferDeformFS[BS].txt |
Film Surface Topography + Wafer Deformation (Wafer
Shape during Process) |
| 13. |
CMPSPSMFS[BS].txt |
Selected Points Results |
| 14. |
CMPPadPrssFS[BS].txt |
Pad Pressure |
| 15. |
CMPPadDispFS[BS].txt |
Pad Deformation |
| 16. |
NanotopographyFS[BS].txt |
Nanotopography after Process |
| 17. |
CMPWaferDeform.txt |
Wafer Elastic Deformation |
| 18. |
CMPTV.txt |
Wafer Thickness Variation |
| 19. |
CMPWarp.txt |
Wafer Warp |
| 20. |
FMatrixFS[BS]-Pad###.txt |
FMatrix |
| 21. |
IFMatrixFS[BS]-Pad###.txt |
Inverse FMatrix |
| 22. |
BCMatrixFS[BS].txt |
Boundary Condition |
| 23. |
IniShapeFS[BS].txt |
Initial Shape Data |
| 24. |
KMatrix.txt |
K Matrix |
| 25. |
WMatrix.txt |
W Matrix |
| 26. |
LMatrix.txt |
L Matrix |
| 27. |
ILMatrix.txt |
Inverse L Matrix |
| 28. |
FEMElementNode.txt |
FEM Information |
| 29. |
CMPFBD.txt |
Difference of Pressure between Front and Back Side |
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