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Sample21
Mode: CMPSingleSidePolishingWaferRigidPeriodicHeat
STI CMP considering Frictional Heat Generation
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

5 min 11 sec
Removal (1 sec x 300 CMP steps)

2 min 18 sec
Total

7 min 29 sec


Friction Force Distribution at 140 sec


Temperature Distribution at 140 sec
Reference:
"CMP Process Model Considering Frictional Heat Generation by BEM", Proc. CMP-MIC, 411 (2004)

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Last modified: 04/30/05