Up
4 min 32 sec
1 min 58 sec
6 min 30 sec
Temperature Distribution at 18 sec
Film Surface Height at 18 sec
"CMP Process Model Considering Frictional Heat Generation by BEM", Proc. CMP-MIC, 411 (2004)
Select the items that apply, and then let us know how to contact you.
Send product literature Send company literature Have a salesperson contact me
