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Sample23
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Sample23
Mode: CMPPadAsperitySimulation
Pad Asperity Analysis
Single Sphere with Boussinesq's Solution
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

 9 min 25 sec
Removal (1 sec x 100 steps)

30 min 27 sec
Total

39 min 52 sec


Pad Asperity Deformation


 

 

Cross Section
Reference:
"Pad Asperity Parameters for CMP Process Simulation", Proc. MRS, K8.4 (2004)

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Last modified: 12/01/05