|
Up
| |
| Sample25 |
| Mode:
CMPPadAsperitySimulation |
Pad Asperity Analysis
Single
Sphere with Yukawa Potential Type Solution |
| Computational Time (PentiumIII
929MHz) |
| FMatrix Generation and Inversing |
09 min 24 sec |
| Removal (47 steps) |
31 min 26 sec |
| Total |
40 min 50 sec |
|
Pad Asperity Deformation |
Pad Asperity Deformation |
Reference:
"Pad
Asperity Parameters for CMP Process Simulation", Proc. MRS,
K8.4 (2004)
|
|
