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Up
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| Sample26 |
| Mode:
CMPPadAsperitySimulation |
Pad Asperity Analysis
Periodic
Spheres with Yukawa Potential Type Solution |
| Computational Time (PentiumIII
929MHz) |
| FMatrix Generation and Inversing |
0 h 46 min 38 sec |
| Removal (47 steps) |
0 h 31 min 02 sec |
| Total |
1 h 17 min 40 sec |
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Pad Asperity Deformation |
Pad Asperity Deformation |
Reference:
"Pad
Asperity Parameters for CMP Process Simulation", Proc. MRS,
K8.4 (2004)
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