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Sample28
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Sample28
Mode: CMPPadAsperitySimulation
Pad Asperity Analysis
Periodic Cylinders
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

0 h 46 min 40 sec
Removal (47 steps)

0 h 29 min 17 sec
Total

1 h 15 min 57 sec


Pad Asperity Deformation


Pad Asperity Deformation
Reference:
"Pad Asperity Parameters for CMP Process Simulation", Proc. MRS, K8.4 (2004)

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Last modified: 12/01/05