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Sample30
Mode: CMPPadAsperitySimulation
Pad Asperity Analysis
Periodic Cones
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

0 h 46 min 45 sec
Removal (47 steps)

0 h 32 min 36 sec
Total

1 h 19 min 21 sec


Pad Asperity Deformation


Pad Asperity Deformation
Reference:
"Pad Asperity Parameters for CMP Process Simulation", Proc. MRS, K8.4 (2004)

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Last modified: 12/01/05