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Sample32
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Sample32
Mode: CMPPadAsperitySimulation
Pad Asperity Analysis
Periodic Pores
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

46 min 44 sec
Removal (47 steps)

12 min 58 sec
Total

59 min 42 sec


Pad Asperity Deformation


 

 

Cross Section
Reference:
"Pad Asperity Parameters for CMP Process Simulation", Proc. MRS, K8.4 (2004)

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Last modified: 12/01/05