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Sample33
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Sample33
Mode: CMPPadAsperitySimulation
Pad Asperity Analysis
Real Pad 2D
Computational Time (PentiumIII 929MHz)
FMatrix Generation and Inversing

4 min 31 sec
Removal (47 steps)

3 min 27 sec
Total

7 min 58 sec


Pad Asperity Deformation


2D Bearing Area Curve
Reference:
"Pad Asperity Parameters for CMP Process Simulation", Proc. MRS, K8.4 (2004)

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Last modified: 12/01/05