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Up
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| Sample40 |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
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Pattern
Symmetry - Star |
| Computational Time (PentiumIII
929MHz) |
| FMatrix Generation and Inversing |
0 min 15 sec |
| Removal (1 sec x 190 CMP steps) |
1 min 17 sec |
| Total |
1 min 32 sec |
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Surface Profile |
Pressure Distribution |
Reference:
"Pattern Symmetry and CMP Process Simulation", Proc. MRS, W6.7, (2005)
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