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Search: Chemical Mechanical Planarization
Category: The Web
Matches: 33 result(s)
Date: 7/10/2003 1:20:44 PM
Search mode: All the words
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Semiconductor Tour: Chemical Mechanical Planarization
... CMP (Chemical Mechanical Planarization) is an abrasive process used for polishing the surface of the wafer flat. ...
http://www.infras.com/Tutorial/sld013.htm - 94%
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÷÷÷ Korea Chemical Mechanical Planarization Users Group Meeting...
Korea Chemical Mechanical Planarization Users Group Meeting ID PASS &
http://cmpugm.com/ - 87%
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'Planarization bonanza turns nasty.(use of chemical mechanical planarization in semiconductor manufacture ...
The trend to denser circuitry in semiconductors has triggered increased use of chemical mechanical planarization CMP and has made CMP slurries the fastest growing segment of the electronic... eLibrary free preview. Free trial membership required for full a
http://ask.elibrary.com/getdoc.asp?refid=altaf5&pubname=Chemical_Week&puburl=http~C~~S~~S~www.chemweek.com~S~&querydocid=28666496@urn:bigchalk:US;Lib&dtype=0~0&dinst=0&title=Planarization%20bonanza%20turns%20nasty.(use%20of%20chemical%20mechanical%20planarization%20in%20semiconductor%20manufacture)&date=12/17/1997&author=Gain,%20Bruce%20Hunter,%20David - 85%
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Rodel Inc.
Offers a fully-integrated solutions for chemical mechanical planarization (CMP) and surface preparation needs for semiconductor devices, silicon and other substrate wafers, computer memory disks, and precision optics.
http://www.rodel.com - 85%
Result found by: Open Directory Project

SC Solutions: Chemical Mechanical Planarization (CMP)
Chemical Mechanical Planarization (CMP) The CMP Process The primary function of CMP is to smooth a nominally macroscopically flat wafer at the feature (or micro &
http://www.scsolutions.com/cmp.html - 85%
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Wiley Europe :: Chemical Mechanical Planarization of ...
WileyEurope > Engineering > Mechanical Engineering > Thermodynamics > Chemical Mechanical Planarization of Microelectronic Materials. ...
http://www.wileyeurope.com/WileyCDA/WileyTitle/productCd-0471138274.html - 81%
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Chemical Mechanical Planarization for Microelectronics ...
Course: Chemical Mechanical Planarization for Microelectronics Manufacturing. Course Objectives: Learn about the fundamental principles ...
http://www.avs.org/shortcourses/catalog/materials/cmp.html - 79%
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Click here to buy Chemical Mechanical Planarization in Ic Device Manufacturing at Amazon.com
Chemical Mechanical Planarization in Ic Device Manufacturing Chemical Mechanical Planarization in Ic Device Manufacturing 156677201X.
http://www.amazon.com/exec/obidos/ASIN/156677201X/avsearch-bkasin-20 - 78%
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CMP Technology
Provides the CLIP software package for pattern density calculation, chemical mechanical planarization (CMP) simulation, and smart dummy fill to improve uniformity and yield.
http://www.cmptechnology.com/ - 78%
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SMTnet.com Industry Event Listing
Chemical Mechanical Planarization Wed, December 11, 2002 08:00:00AM Wed, December 11, 2002 05:00:00PM Texas ,United States of America
http://www.smtnet.com/mail/index.cfm?fuseaction=redir&idl=86&idml=124219 - 78%
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SMTnet.com Industry Event Listing
Chemical Mechanical Planarization Wed, December 11, 2002 08:00:00AM Wed, December 11, 2002 05:00:00PM Texas United States of America
http://www.smtnet.com/mail/index.cfm?fuseaction=redir&idl=86&idml=124219 - 78%
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Buy Chemical Mechanical Planarization of Microelectronic Materials at...
Shop here for Chemical Mechanical Planarization of Microelectronic Materials and find more books at Amazon.com. For a limited time, get free shipping on orders over $25!
http://www.amazon.com/exec/obidos/ASIN/0471138274/inktomi-bkasin-20 - 74%
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CHEMICAL MECHANICAL PLANARIZATION
CHEMICAL MECHANICAL PLANARIZATION OF MICROELECTRONIC ... using abrasives. Chemical Mechanical Planarization (CMP) is a method ... technology and advanced planarization schemes. Chapter ... Chapter 4: has the mechanical and chemical scientific principles ..
http://www.abrasivesmall.com/bkcmp.htm - 74%
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FIBER OPTIC END POINT DETECTORS FOR CHEMICAL MECHANICAL PLANARIZATION
& any length and any type of sheathing. These fiber bundles are used for end point detection in chemical -mechanical planarization . &
http://www.wavelinktechnology.com/fiberopticbundles.html - 74%
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LAM Research Corporation
Company provides products for etch, chemical mechanical planarization, and cleaning.
http://www.lamrc.com - 72%
Result found by: Open Directory Project

Courses Semiconductor Training - Fundamentals of CMP or Chemical ...
"We Exceed Your Expectations!" Fundamentals of Chemical Mechanical Planarization. PTI Seminars, Inc. has developed a new program explaining the basics of CMP. ...
http://www.pti-inc.com/Courses/cmpmain.html - 71%
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Novellus Systems - Chemical Mechanical Planarization
Chemical Mechanical Planarization Chemical Mechanical Planarization (CMP) was introduced in the 1980's as a method of extending the capability of optical lithography techniques by increasing the ...
http://www.novellus.com/products/cmp.asp - 66%
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The Global Outlook for Chemical Mechanical Planarization Technologies...
& How Can We Help You? The Global Outlook for Chemical Mechanical Planarization Technologies and Materials 1998-2003 Published December 1998 &
http://www.klinegroup.com/y398.htm - 63%
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eLibrary.com - Chemical Week, 'Planarization bonanza turns nasty.(use...
eLibrary is the subscription based online library for fun or research. Find out more about securing your guaranteed Free 7-day trial with your credit card and retrieve 'Planarization bonanza turns nasty.(use of chemical mechanical planarization in ...
http://ask.elibrary.com/getdoc.asp?pubname=Chemical_Week - 61%
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Wiley :: Chemical Mechanical Planarization of Microelectronic ...
Wiley > Engineering > Mechanical Engineering > Thermodynamics > Chemical Mechanical Planarization of Microelectronic Materials. ...
http://www.wiley.com/WileyCDA/WileyTitle/productCd-0471138274.html - 61%
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CMP Chemical Mechanical Planarization Polishing Pads Development
& within Hard Disk Drive and Fiber Optic polishing applications, Mipox began development of its line of Chemical Mechanical Planarization (CMP) Polishing Pads for the Semiconductor Market. Mipox...
http://www.mipox.com/cmp_polishing_pads.htm - 55%
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New Page 2
... Chemical Mechanical Planarization. Name: Dr. Ashok Kumar ...
http://www.eng.usf.edu/~zantye/people.htm - 55%
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CHEMICAL MECHANICAL PLANARIZATION
CHEMICAL MECHANICAL PLANARIZATION OF MICROELECTRONIC MATERIALS by Joseph Steigerwald and others Wiley 1997, 324 pages ... process using abrasives. Chemical Mechanical Planarization (CMP) is ...
http://www.abrasiveengineering.com/bkcmp.htm - 52%
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Chemical Mechanical Planarization
... Chemical Mechanical Planarization: Fundamentals and Practice by V. Desai, A. Dogariu, K. Richardson, S. Seal, and K. Sundaram, University of Central Florida ...
http://www.electrochem.org/sc/past/19805.htm - 48%
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Material removal regions in chemical mechanical planarization for...
... weight concentration has been proposed for chemical. mechanical planarization/polishing (CMP) by extending a mate- ...
http://www.me.berkeley.edu/~jianfeng/MRRegion.pdf - 48%
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Chemical Mechanical Planarization
... Chemical Mechanical Planarization. Your browser does not support script! ...
http://www.microe.rit.edu/cmp.html - 42%
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Chipworks - Publications - Chemical Mechanical Planarization
CMP 2000 REPORT Chemical Mechanical Planarization This report will teach you about the latest advances in CMP process and consumables. ...
http://www.ice-corp.com/publications/cmp.htm - 42%
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Monte-Carlo Methods For Chemical-Mechanical Planarization on...
Chemical mechanical planarization CMP and other manufacturing steps in very deep submicron VLSI have varying effects on device and interconnect features, depending on the local layout density. To improve manufacturability and performance ... ... chemical-m
http://citeseer.nj.nec.com/chen02montecarlo.html - 35%
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TRY IT! SpeedFam-IPEC Auriga Vision chemical mechanical planarization...
& SpeedFam-IPEC integrates multi-platen Chemical Mechanical Planarization technology with advanced wafer cleaning & do you need CMP? See why chemical mechanical planarization is essential in...
http://www.e-try.com/vision.htm - 35%
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Wiley Canada :: Chemical Mechanical Planarization of ...
... Wiley Canada > Engineering > Mechanical Engineering > Thermodynamics > Chemical Mechanical Planarization of Microelectronic Materials. ...
http://www.wileycanada.com/WileyCDA/WileyTitle/productCd-0471138274.html - 35%
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Chemical Mechanical Planarization
Chemical Mechanical Planarization Self-Check / Assessment 6. The polishing pad a. must be conditioned prior to CMP b. is often composed of cast or impregnated polyurethane or similar material. c ...
http://www.matec.org/ps/modules/Mod_Assessment/M068SA/m068sa6.htm - 33%
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Surface Chemistry Studies of Copper Chemical Mechanical Planarization
... Surface chemistry studies of the chemical mechanical planarization CMP of copper are presented in this paper. ...
http://www.ipr.umd.edu/ppm/Papers/JES0G389.pdf - 29%
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Chemical Mechanical Planarization
Chemical Mechanical Planarization Self-Check / Assessment 3. The slurry contains: a. chemicals used in the process b. abrasives used in the process c. ice particles minutely crushed d. a and b e ...
http://www.matec.org/ps/modules/Mod_Assessment/M068SA/m068sa3.htm - 26%
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