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Sample21
Sample22
Sample23
Sample24
Sample25
Sample26
Sample27
Sample28
Sample29
Sample30
Sample31
Sample32
Sample33
Sample34
Sample35
Sample36
Sample37
Sample38
Sample39
Sample40
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Sample21~40 are available only for subscribers.
| Sample21 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicHeat |
 STI-CMP
 Frictional Heat Generation |
| Total Calculation Time (PentiumIII
929MHz) |
7 min 29 sec |
| Sample22 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicHeat |
 Cu-CMP
Activation Energy, Fanging
Effect |
| Total Calculation Time (PentiumIII
929MHz) |
6 min 30 sec |
| Sample23 (more
detail) |
| Mode: CMPPadAsperitySimulation |
Pad Asperity Analysis
Single
Sphere with Boussinesq's Solution
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
39 min 52 sec |
| Sample24 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Spheres with Boussinesq's Solution
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 18 m 03 s |
| Sample25 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Single
Sphere with Yukawa Potential Type Solution
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
40 min 50 sec |
| Sample26 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Spheres with Yukawa Potential Type Solution
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 17 m 40 s |
| Sample27 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Truncated Spheres
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 16 m 55 s |
| Sample28 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Cylinders
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 15 m 57 s |
| Sample29 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Square Poles
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 17 m 36 s |
| Sample30 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Cones
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 19 m 21 s |
| Sample31 (more
detail) |
| Mode:
CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Truncated Cones
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 19 m 36 s |
| Sample32 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Periodic
Pores
Contact Mechanics
|
| Total Calculation Time (PentiumIII
929MHz) |
59 m 42 s |
| Sample33 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Real
Pad 2D
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
7 min 58 sec |
| Sample34 (more
detail) |
| Mode: CMPPadAsperitySimulation |
 Pad
Asperity Analysis
Real
Pad 3D
Contact Mechanics |
| Total Calculation Time (PentiumIII
929MHz) |
1 h 12 m 01 s |
| Sample35 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidWithRefPln |
 Poly-Si
Damascene CMP
with Pad Asperity Parameters
Pad Asperity Parameters |
| Total Calculation Time (PentiumIII
929MHz) |
23 min 59 sec |
| Sample36 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
 Pattern
Symmetry - Line&Space
Pattern Symmetry Matrix |
| Total Calculation Time (PentiumIII
929MHz) |
1 min 24 sec |
| Sample37 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
 Pattern
Symmetry - Cross Patterns
Pattern Symmetry Matrix |
| Total Calculation Time (PentiumIII
929MHz) |
1 min 32 sec |
| Sample38 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
 Pattern
Symmetry - Thick Line&Space
Pattern Symmetry Matrix |
| Total Calculation Time (PentiumIII
929MHz) |
1 min 14 sec |
| Sample39 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
 Pattern
Symmetry - Zigzag
Pattern Symmetry Matrix |
| Total Calculation Time (PentiumIII
929MHz) |
1 min 30 sec |
| Sample40 (more
detail) |
| Mode:
CMPSingleSidePolishingWaferRigidPeriodicSymmetry |
 Pattern
Symmetry - Star
Pattern Symmetry Matrix |
| Total Calculation Time (PentiumIII
929MHz) |
1 min 32 sec |
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